2020年8月31日 The design, analysis, and simulation of a new Micro-electromechanical System (MEMS) gyroscope based on differential tunneling magnetoresistance sensing
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2019年8月22日 This paper proposes a silicon-based micro-electro-mechanical systems (MEMS) tuning fork gyroscope designed for high-g shock environments. The results
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2018年9月25日 In this paper, we report design, fabrication and characterization of a MEMS tuning-fork gyroscope. The main novelty of the reported work is in devising and using an
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2020年11月1日 The working scheme of feMEMS is demonstrated considering the mechanical design of a triaxial beating-heart MEMS gyroscope. Two possible
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2015年8月6日 Research development of the MEMS gyroscope is introduced in this paper. Generally, MEMS gyroscopes are used in so many occasions that they have become
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2018年7月25日 limitations in conventional AM MEMS gyroscope design. This research primarily aims to improve MEMS gyroscope performance by integrating a frequency
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2022年8月4日 The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor
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2017年10月7日 This is the key physical principle of the vibrating mass MEMS gyroscope, described like a mass-spring system (see Figure 9 b). The vibrating mass MEMS
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2022年11月18日 In MEMS gyros the primary motion cannot be continuous rotation as in conventional ones due to a lack of good bearings in MEMS. Instead, mechanical
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2022年9月29日 Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of attention over the last two decades because of their low power
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2020年4月15日 This paper presents a design optimization approach for a single-drive, 3-axis Microelectromechanical Systems (MEMS) gyroscope. Mathematical models for springs are obtained and a simplified structure for single-drive, 3-axis MEMS gyroscope is proposed. In the proposed structure, concentrated spring architecture was exploited to critical
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2020年11月24日 The mechanical model of a MEMS vibratory ring gyroscope is shown in Fig. 1.It is composed of an elastic ring body, 8 semi-annular support beams and some drive and sense electrodes, where \(\rho \), R, r, h and b denote the mass density, centroidal radius, arbitrary radius with angle \(\theta \), radial thickness and axial width of the ring,
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2020年11月1日 The symmetry of the MEMS gyroscope layout allows to parametrize only the elements in the first quadrant, while the other quarters of the structure can be obtained by mirroring. ... 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS (2019), pp. 708-711, 10.1109/MEMSYS.2019.8870783. View in Scopus
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2018年9月25日 In this paper, we report design, fabrication and characterization of a MEMS tuning-fork gyroscope. The main novelty of the reported work is in devising and using an experimental set-up for angular rate measurements using an open die MEMS gyroscope structure. A detailed methodology of characterization of the gyroscope is discussed. The
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2022年1月24日 This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as mode matching, improving the quality factor, etc. This paper focuses on the analysis of mode shape, and effectively
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2022年8月4日 The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving parts to extend the service life and significantly improve accuracy. The highest accuracy is
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2018年7月25日 limitations in conventional AM MEMS gyroscope design. This research primarily aims to improve MEMS gyroscope performance by integrating a frequency modulated (FM) readout system into the design using a cantilever beam and microplate design. The FM resonance sensing approach has been demonstrated to provide better
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gyroscope combined with a simple and novel AGC (automatic gain control) loop for the force rebalance control to achieve enhanced sensor performances. In section 2, we illustrate basic principles and structure design of the proposed MEMS gyroscope. The fabrication of the mechanical structure and electrode is described in section 3.
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2021年1月2日 The MEMS (Micro-Electro-Mechanical System) vibratory gyroscope (MVG) is a kind of complex micro-sensor. Its operation is based on the Coriolis principle to transfer the vibration energy of a rotation body from the primary mode into the secondary one (Acar and Shkel 2008; Shkel et al. 1999; Apostolyuk and Tay 2004).The amplitude of the
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2005年5月16日 2012. TLDR. Noise analysis of closed-loop MEMS vibratory gyros whose noise characteristics are dominated by the mechanical-thermal noise of the sensor's vibrating structure as well as the electrical noise associated with the pickoff signal conditioning electronics in the sense channel is presented. 14. PDF.
Read More2020年4月15日 This paper presents a design optimization approach for a single-drive, 3-axis Microelectromechanical Systems (MEMS) gyroscope. Mathematical models for springs are obtained and a simplified structure for single-drive, 3-axis MEMS gyroscope is proposed. In the proposed structure, concentrated spring architecture was exploited to critical
Read More2020年11月24日 The mechanical model of a MEMS vibratory ring gyroscope is shown in Fig. 1.It is composed of an elastic ring body, 8 semi-annular support beams and some drive and sense electrodes, where \(\rho \), R, r, h and b denote the mass density, centroidal radius, arbitrary radius with angle \(\theta \), radial thickness and axial width of the ring,
Read More2018年9月25日 In this paper, we report design, fabrication and characterization of a MEMS tuning-fork gyroscope. The main novelty of the reported work is in devising and using an experimental set-up for angular rate measurements using an open die MEMS gyroscope structure. A detailed methodology of characterization of the gyroscope is discussed. The
Read More2020年11月1日 The symmetry of the MEMS gyroscope layout allows to parametrize only the elements in the first quadrant, while the other quarters of the structure can be obtained by mirroring. ... 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS (2019), pp. 708-711, 10.1109/MEMSYS.2019.8870783. View in Scopus
Read More2022年1月24日 This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as mode matching, improving the quality factor, etc. This paper focuses on the analysis of mode shape, and effectively
Read More2018年7月25日 limitations in conventional AM MEMS gyroscope design. This research primarily aims to improve MEMS gyroscope performance by integrating a frequency modulated (FM) readout system into the design using a cantilever beam and microplate design. The FM resonance sensing approach has been demonstrated to provide better
Read Moregyroscope combined with a simple and novel AGC (automatic gain control) loop for the force rebalance control to achieve enhanced sensor performances. In section 2, we illustrate basic principles and structure design of the proposed MEMS gyroscope. The fabrication of the mechanical structure and electrode is described in section 3.
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2022年11月18日 In MEMS gyros the primary motion cannot be continuous rotation as in conventional ones due to a lack of good bearings in MEMS. Instead, mechanical oscillation is used as the primary motion. When the oscillating gyro is subjected to angular rate orthogonal to the direction of the primary motion, an undulating Coriolis force results.
Read More2022年9月29日 Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of attention over the last two decades because of their low power consumption, easy integration, and low fabrication cost. The usage of the gyroscope equipped with an inertial measurement unit has increased tremendously, w
Read More2005年5月16日 2012. TLDR. Noise analysis of closed-loop MEMS vibratory gyros whose noise characteristics are dominated by the mechanical-thermal noise of the sensor's vibrating structure as well as the electrical noise associated with the pickoff signal conditioning electronics in the sense channel is presented. 14. PDF.
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